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64-3460KA412-006
TESCOM 64-3460KA412 Dual Stage High Purity Regulator, 0-30psig outlet pressure - 316 stainless steel, untied diaphragm, with gauge ports
$1,749.00
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Product Description
Details
TESCOM 64-3400-006 Series dual-stage, ultra-high purity pressure reducing regulator offers a tied diaphragm design and 10 Ra microinch / 0.25 micrometer surface finish with optional Hastelloy trim. Inlet pressure is 3500 psig with outlet pressures up to 150 psig.
Applications
•Gas cabinets
•Semiconductor manufacturing
•Research labs
Features & benefits
•10 Ra microinch / 0.25 micrometer internal surfaces
•Full internal Electropolish available
•Metal-to-metal body to diaphragm seal for high leak integrity
•Choice of free poppet or tied diaphragm
Technical Spec
Technical Spec
| Short Description | TESCOM 64-3460KA412 Dual Stage High Purity Regulator, 0-30psig outlet pressure - 316 stainless steel, untied diaphragm, with gauge ports |
|---|---|
| Specification | Operating parameters Outlet pressure ranges: 0-30, 0-60, 0-100, 0-150 psig Design proof pressure: 150% maximum rated Operating temperature:
Media contact materials Stem and Valve Spring: 316 Stainless Steel Other Cleaning: DI water electronic grade cleaned and ES500 Particle Certified for internal electropolish models Internal volume: 12 cc |
| Material | 316 Stainless Steel |
| Series | 64-3400 |
| Outlet Pressure Range | 0-30psig |
| Port Size | 1/4" |
| Port Type | HPIC |
| Sensing Type | Diaphragm |
| Stages | Dual |
| CV | 0.02 |
| Seat Material | PCTFE |
| Load Type | Spring |
| Venting | Non-venting |
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